Micro-fabrication in IMSE Cleanroom

Home Research Applications Equipment Information Technical Info Recipes Policies iLab

Acid Fume Hood AJA E-beam Evaporator ALD Instrument Asher Disco Dicing Saw Ellipsometer Heidelberg Laser Writer Mask Aligner 3" Mask Aligner 4" Nanofab PECVD Sytem Optical Microscope (Class 100) Optical Microscope (Class 10,000) Parylene Deposition System Probe Station Profilometer Reactive Ion Etch (RIE) CR-Solvent Fume Hood (1) CR-Solvent Fume Hood (2) L27-PDMS Fume Hood L27-Solvent Hood-A L27-Solvent Hood-B L27-Acid Hood Spin Coater Sputter Deposition Tool Thermal Evaporator Tube Furnace UV Ozone Cleaner

Thermal Evaporator

Book a Reservation/Equipment Availability - Request Training

The Edwards Auto 306 Vacuum coater deposits material in vacuum conditions by heating the source material. Films have low impurity due to high vacuum conditions. Growth rates are typically ~0.1 nm/s. Up to four materials can be deposited in-situ without breaking the vacuum. Users are expected to provide their own consumables, including boats and source materials.

IMSE Contact & Approved Trainer:
Rahul Gupta (rgupta24@wustl.edu)

Training Documents:
NOTE: User must demonstrate skills to IMSE staff before independent use.
Operating instructions

Click here to see the current recipes

Technical Info:
Quartz Crystal Microbalance (QCM) — Read Section 7.3 for calibration procedure and Appendix A for parameters for selected material.