Micro-fabrication in IMSE Cleanroom

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Thermal Evaporator

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The Edwards Auto 306 Vacuum coater deposits material in vacuum conditions by heating the source material. Films have low impurity due to high vacuum conditions. Growth rates are typically ~0.1 nm/s. Up to four materials can be deposited in-situ without breaking the vacuum. Users are expected to provide their own consumables, including boats and source materials.

IMSE Contact & Approved Trainer:
Rahul Gupta (rgupta24@wustl.edu)

Training Documents:
NOTE: User must demonstrate skills to IMSE staff before independent use.
Operating instructions

Recipe:
Click here to see the current recipes

Technical Info:
Quartz Crystal Microbalance (QCM) — Read Section 7.3 for calibration procedure and Appendix A for parameters for selected material.