Micro-fabrication in IMSE Cleanroom

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Spin Coater

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The Brewer Science CEE 200X Spin Coater, located in Solvent Fume hood(1), can spin up to 6000 rpm with high accuracy and repeatability. The Windows based touch screen interface is highly user friendly to operate. Typically, it is used for Photolithography processes to deposit uniform film thickness on silicon substrate from few 10's of nanometer to 100's of micrometer depending on the selected resist material.

IMSE Contact & Approved Trainer:
Rahul Gupta (rgupta24@wustl.edu)

Training Documents:
NOTE: User must demonstrate skills to IMSE staff before independent use.
Operating instructions
Training Videos

Click here to see existing recipes

Technical Info:
Safety Data Sheets of chemicals
AZP4620 Resist datasheet
KL IR 15 Resist datasheet
S1805 Resist datasheet
SU8-2025 Resist datasheet
SU8-2050 Resist datasheet
MCC Primer 80/20
950 PMMA A8