Book a Reservation/Equipment Availability - Request Training

The KLA Tencor D-100 series profilometer measures the 2D surface topography, step height and thin film stress by using a stylus in close contact with the surface while maintaining the set force between the stylus and surface. 2D profiles can scan up to 30 mm in length. The technique is usually non-destructive except for very soft organic material based films.

IMSE Contact & Approved Trainer:
Rahul Gupta (rgupta24@wustl.edu)

Training Documents:
NOTE: User must demonstrate skills to IMSE staff before independent use.
Operating instructions

Recipe:
N/A

Technical Info:
Instrument Specifications