Micro-fabrication in IMSE Cleanroom

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Operating hours: Monday - Friday from 8 AM - 5 PM


Cleanroom Status: Open with limitations under Orange Level 3


Equipment Status:

Affected instruments are listed below:

E-beam deposition (Class 10,000):
(Installation in progress) Working with Prof. Erik Henriksen to complete installation

Laser writer:
Do not use wafer centering with 10 mm head. An alternate method is available to perform the same task.