Micro-fabrication in IMSE Cleanroom

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Probe Station

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The Signatone S-1008 Probe station can be used to precisely measure substrate (or thin film on substrate) electrical properties using the Keithley 238 Source Measure Unit. Probes can be placed with sub-100 micron precision. 2-wire and 4-wire measurements are available. Probes are adjustable to meet different substrate size requirements. LCR 800 meter is also available for measuring additional electrial properties. Measurements can be taken in manual and automated manner.

IMSE Contact & Approved Trainer:
Rahul Gupta (rgupta24@wustl.edu)

Training Documents:
NOTE: User must demonstrate skills to IMSE staff before independent use.
Operating Instructions

Recipe:
N/A

Technical Info:
Keithley 238 Manual
LCR 800 manual