Micro-fabrication in IMSE Cleanroom

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Acid Fume Hood AJA E-beam Evaporator ALD Instrument Asher Disco Dicing Saw Ellipsometer Heidelberg Laser Writer Mask Aligner 3" Mask Aligner 4" Nanofab PECVD Sytem Optical Microscope (Class 100) Optical Microscope (Class 10,000) Parylene Deposition System Probe Station Profilometer Reactive Ion Etch (RIE) CR-Solvent Fume Hood (1) CR-Solvent Fume Hood (2) L27-PDMS Fume Hood L27-Solvent Hood-A L27-Solvent Hood-B L27-Acid Hood Spin Coater Sputter Deposition Tool Thermal Evaporator Tube Furnace UV Ozone Cleaner

Nanofab PECVD System

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Oxford Instrument's Nanofab provides the capability to deposit thin films of SiO2, SiN, p-Si, a-Si, Graphene, Nanotubes, etc. The standard gasses connected to the instrument are Ar, N2O, N2, CH4, 2%SiH4 in Ar, NH3, and H2. For more process capability, please contact IMSE staff.

IMSE Contact & Approved Trainer:
Rahul Gupta (rgupta24@wustl.edu)

Training Documents:
NOTE: User must demonstrate skills to IMSE staff before independent use.
Operating instructions

Click here to see existing recipes

Technical Info:
Instrument Specifications