Micro-fabrication in IMSE Cleanroom

Home Research Applications Equipment Information Technical Info Recipes Policies iLab

Acid Fume Hood AJA E-beam Evaporator ALD Instrument Asher Disco Dicing Saw Ellipsometer Heidelberg Laser Writer Mask Aligner 3" Mask Aligner 4" Nanofab PECVD Sytem Optical Microscope (Class 100) Optical Microscope (Class 10,000) Parylene Deposition System Probe Station Profilometer Reactive Ion Etch (RIE) CR-Solvent Fume Hood (1) CR-Solvent Fume Hood (2) L27-PDMS Fume Hood L27-Solvent Hood-A L27-Solvent Hood-B L27-Acid Hood Spin Coater Sputter Deposition Tool Thermal Evaporator Tube Furnace UV Ozone Cleaner

L27-Solvent Hood(A)

Book a Reservation/Equipment Availability - Request Training

The Solvent hood has the capability to handle any number of solvents and developers. This is located in Lab L27 (outside cleanroom). Waste is handled in a controlled and safe manner. Additional DI water is available for high purity applications.

IMSE Contact & Approved Trainer:
Rahul Gupta (rgupta24@wustl.edu)

Training Documents:
NOTE: User must demonstrate skills to IMSE staff before independent use.
Operating instructions

Recipe:
N/A

Technical Info:
Safety Data Sheets of chemicals