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The Optical microscope in cleanroom (Class 10000) can measure feature sizes down to 0.6 micrometer. The following objective lenses are available: 5x, 10x, 20x, 50x, and 100x. Other applications include:

• Instrument is also useful in making a qualitative assessment on when the chemcial development process during lithoraphy has been successfully completed. Surface contrast and roughness helps in making the determination.
• Verifying the undercut in a two-layer lithography process as part of metal layer patterning by a lift-off technique

IMSE Contact & Approved Trainer:
Rahul Gupta (rgupta24@wustl.edu)

Recipe:
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Technical Info:
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