Micro-fabrication in IMSE Cleanroom

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Metal Deposition (Thermal)

Metal Deposition by Thermal evaporataion starts by heating the material of interest at a high enough temperature that creates a sufficient vapor pressure of material in vacuum. Typically, the material is used in small pellet form (e.g. 1mm size) and kept inside/top of boat (e.g. tungsten). The boat material is selected such that it has higher melting point and that does not form alloy with material of interest. High current is passed through boat to heat the boat/material (resistive heating) to desired temperature. The evaporated material is then deposited on substrate of intereste. High mean free path in vacuum ensures that most evaporated material is deposited on the substrate of interest.

Step-by-Step illustration of Metal Deposition Process:

STEP 1: Start with Si wafer (substrate)

STEP 2: Si wafer (substrate) with Aluminum thin film on top

The above process can be carried out in IMSE Facility. IMSE offers (Thermal Evaporator) to accomplish the task safely. Click the link to start the training process.

Thin film metrology

Estimating film deposition peformance (deposition rate, planar roughness, side wall roughness, etc.) is critical to fabricate device at micron scale in repeated manner. IMSE offers number of instruments (Profilometer, Optical Microscope, In-situ Quartz Crystal Microbalance (QCM) Sensor, SEM) to help in the quantitative measurements.